Prof. Dr.-Ing. Matthias Wapler
Prof. Dr. Matthias Wapler
Chair of Micro Systems Engineering
Current projects
Sustainable microsystems technology for micromechanics and biomedical applications
Duration: 01.02.2024 to 31.12.2025
Procurement of equipment to consolidate and modernize the microsystems technology laboratory, in particular with regard to economic and ecological sustainability.
With a new modular coating system with different sputtering and evaporation sources, we can deposit a wide range of dielectrics and metals in flexible compositions over a broad spectrum of layer thicknesses in a resource-saving manner. This is complemented by a parylene (high-performance polymer) coating system for the production of insulating layers, ultra-thin diffusion barriers and mechanical protective layers. For structuring in the µm range, we will supplement our laser structuring system with a wavelength for material-selective laser ablation, and a new 5-axis micro-milling machine will be used to produce mechanical and fluidic structures in the sub-mm range, or to produce corresponding impression molds. In characterization, we will be able to supplement our modular, integrated surface profilometer with a laser Doppler vibrometer for dynamic surface measurement in the ultrasonic range. Last but not least, a new plasma furnace with reducing and oxidizing plasma is used for surface cleaning and activation, e.g. for plasma bonding.
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Completed projects
Lead-free programmable multistable piezo-thermal actuators (LEAP)
Duration: 01.06.2020 to 31.05.2025
We aim to develop novel multistable and programmable actuators based on the combination of piezoelectric and thermal actuation. Whilst generally creating new performance and functionality compared to present piezo actuators, we address the key challenge of implementing lead-free alternatives to conventional lead-ziconate-titanate (PZT) based ceramics.
2023
Peer-reviewed journal article
Higher order wavefront correction and axial scanning in a single fast and compact piezo-driven adaptive lens
Gowda, Hitesch; Wallrabe, Ulrike; Wapler, Matthias C.
In: Optics express - Washington, DC : Optica, Bd. 31 (2023), Heft 14, S. 23393-23405
In-line refractive index measurement - a simple method based on image detection
Bodo, Elisabetta; Gowda, Hitesh G. B.; Wallrabe, Ulrike; Wapler, Matthias C.
In: Applied optics - Washington, DC : Optical Soc. of America, Bd. 62 (2023), Heft 23, S. 6282-6286
Fully refractive telecentric f-theta microscope based on adaptive elements for 3D raster scanning of biological tissues
Wang, Wenjie; Schmidt, Katharina; Wapler, Matthias C.; Wallrabe, Ulrike; Czarske, Jürgen W.; Koukourakis, Nektarios
In: Optics express - Washington, DC : Optica, Bd. 31 (2023), Heft 18, S. 29703-29715
Self-sensing of a magnetically actuated prism
Weber, Pascal M.; Wallrabe, Ulrike; Wapler, Matthias C.
In: Sensors - Basel : MDPI, Bd. 23 (2023), Heft 12, Artikel 5493, insges. 10 S.
A miniaturized piezo stack impact actuation mechanism for out-of-plane freely moveable masses
Wapler, Matthias C.; Peter, Constantin; Kanjilal, Koustav; Wallrabe, Ulrike
In: Micromachines - Basel : MDPI, Bd. 14 (2023), Heft 6, Artikel 1192, insges. 11 S.
Reliability of tunable lenses - feedback sensors and the influence of temperature, orientation, and vibrations
Gowda, Hitesh G. B.; Bodo, Elisabetta; Wapler, Matthias C.; Wallrabe, Ulrike
In: Applied optics - Washington, DC : Optical Soc. of America, Bd. 62 (2023), Heft 12, S. 3072-3082
Article in conference proceedings
Herstellung hauchdünner, bleifreier Bariumtitanat-Piezokeramik mittels Inkjet Printing - Fabrication of wafer-thin, lead-free barium titanate piezoceramics using inkjet printing
Ketterer, Ines; Yang, Cheng-Kang; Cimen, Emine; Wapler, Matthias; Hanemann, Thomas
In: Tagung: MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023, Tagungsband MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023 , 2021 - Berlin : VDE Verlag ; Lakner, Hubert, S. 136-139
2021
Book chapter
Bi-axial magnetically actuated tunable prism
Weber, Pascal M.; Wapler, Matthias C.; Lemke, Florian; Wallrabe, Ulrike
In: The 21st International Conference on Solid-State Sensors, Actuators and Microsystems , 2021 - [Piscataway, NJ] : IEEE, S. 431-434
- Prof. Thomas Hanemann